Inspection of common defects in product line:

1. After Develop Inspection
2. After Etch Inspection
3. Post CMP Inspection
4. Fab Outgoing QA

Advantages:

1. High efficiency: The high-speed synchronous motion control technology are adopted to meet the requirements of high-efficiency inspection of IC products in allareas.
2. High detection rate: Feature-based machine learning algorithm are adopted to effectively identify subtle defects andenhance defect inspection rate.
3. Intelligence: Prescription auxiliary editing function are available, personnel efficiencyand be greatlyimprovedand new product introduction cycle can be greatlyshortened.
4. Comprehensiveness: The automatic inspection of each process of IC is available, audit has good material compatibility.
5. Factory automation: It supportsSECS/GEM SEMI standard, which can fully meet the requirements of factory automation.