Inspection of common defects in product line:

1. After Develop Inspection
2. After Etch Inspection
3. Post CMP Inspection
4. Fab Outgoing QA

Advantages:

1. High efficiency: The high-speed synchronous motion control technology are adopted to meet the requirements of high-efficiency inspection of IC products in all areas.
2. High detection rate: Feature-based machine learning algorithms are adopted to effectively identify subtle defects and enhance defect inspection rate.
3. Intelligence: Prescription auxiliary editing function are available, personnel efficiency and be greatly improved and new product introduction cycle can be greatly shortened.
4. Comprehensiveness: The automatic inspection of each process of IC is available, audit has good material compatibility.
5. Factory automation: It supports SECS/GEM SEMI standard, which can fully meet the requirements of factory automation.