Made by single or poly silicon ingot materials. The outside diameter is up to 600mm. The ring product is used in the dry etching machine as the outside electrode.

Advantages:

1.Establishment of plasma etching condition

2.Use as electrodes for RF units

3.Control sidewall damage of the reactive substance, improve etching aspect ratios and optimize etching surfaces

4.Improve the uniformity and yield of the edge of silicon wafer