1. Process application: Waterproof vapor protective layer, optical coating, functional film (hydrophilic layer, hydrophobic layer)
2. Wafer size: 8 inches and below
3. Sedimentary materials: Al2O3、TiO2、SiO2、HfO2、ZrO2、AlN、TiN  et al
4. Application area: Mini LED, Micro LED, UVC LED and vehicle outdoor lighting LED, optical lens (need to be laminated), AR grating, MEMS sensor, SAW&BAW filter.